Force sensing apparatus

ABSTRACT

Force sensing apparatus is provided for sensing deflection of a transducer ( 8 ) in an ultrasonic welding machine. The apparatus includes a body member ( 2 ), a transducer holder ( 1 ) and a force sensor ( 4 ). The transducer holder ( 1 ) is adapted to hold an ultrasonic transducer ( 8 ) and the transducer holder ( 1 ) is fixed to the body member ( 2 ). The force sensor ( 4 ) is located between adjacent surfaces ( 11, 12 ) of the body member ( 2 ) and the transducer holder ( 1 ) to sense a force applied between the surfaces ( 11, 12 ).

The invention relates to force sensing apparatus and in particular,force sensing apparatus for monitoring the bond force in an ultrasonicwelding machine.

Ultrasonic welding is commonly used for wire bonding when packagingsemiconductor devices and for other bonding operations. Force sensorsare used in the ultrasonic wire bonding machines to either monitor thequality of the wire bond by measuring the bond force or to generate therequired bond force in response to signals from the sensor.

In some arrangements the force sensor is located in a structure which isexternal from and isolated from the transducer. In other designs, theforce sensor is mounted on the transducer body itself.

Sensors residing on the body of the ultrasonic transducer are normallyof the balanced strain gauge design. They measure the surface strainsproduced by bending of the transducer during bonding and thus indirectlyobtain information regarding the bond force. However, as they contactthe transducer body they exert a load on the transducer, whichinterferes with the operation of the transducer.

Force sensors located in force arms external to the bond-head are, ingeneral, not compact.

In general, piezoelectric force sensors and electrorestrictive forcesensors suffer from the problem of output voltage drift. This introduceserrors in successive measurements. To overcome this problem, a number ofthe prior art machines (see or example, U.S. Pat. Nos. 4,903,883 and5,607,096) use two or more sensors to mutually compensate for any drift.

However, this has the disadvantage of increasing the cost and size ofthe sensor arrangement and also increases the processing required forthe sensor signals.

In accordance with a first aspect of the present invention, there isprovided force sensing apparatus for sensing deflection of a transducerin an ultrasonic welding machine, the apparatus comprising a bodymember, a transducer holder adapted to hold an ultrasonic transducer,the transducer holder being fixed to the body member, and a force sensorlocated between adjacent surfaces of the body member and the transducerholder to sense a force applied between the surfaces.

Preferably, the force sensor senses a force applied in a directionsubstantially parallel to the longitudinal axis of the transducer.

Typically, the adjacent surfaces of the body member and the transducerholder are oblique to the longitudinal axis of the transducer.Preferably, the adjacent surfaces are substantially perpendicular to thelongitudinal axis of the transducer.

Preferably, the force sensor comprises a piezoelectric force sensor.Alternatively, the force sensor may comprise an electrostrictive forcesensor.

Preferably, the sensing apparatus comprises a biasing device locatedbetween one of the adjacent surfaces and the force sensor to provide apreload to the force sensor.

In accordance with a second aspect of the present invention, there isprovided a method of compensating a force sensor for performance changesin the sensor, the method comprising:

(a) at the beginning of a first time interval taking a first referencereading from the sensor with a reference force applied to the sensor;

(b) using the first reference reading as a reference for readings fromthe sensor during the first time interval to obtain an indication of anunknown force applied to the sensor; and

after the end of the first time interval repeating steps (a) and (b).

An advantage of this aspect of the invention is that it permits forcesensors which are prone to drift by resetting the reference level forthe sensor at periodic time intervals.

Preferably, the force sensor may be a piezoelectric force sensor or aelectrorestrictive force sensor.

Typically, the reference reading is a reading of the voltage output fromthe sensor.

Typically, steps (a) and (b) are repeated as frequently as necessary toobtain a sufficiently accurate indication of the unknown force for theapplication in which the force sensor is being used. The lengthsubsequent time intervals may be the same as or different from the firsttime interval.

Typically, the force sensor may be a force sensor for monitoring thecontact force of an ultrasonic welding transducer on a workpiece. Forexample, the transducer may be a wire bonding transducer and theworkpiece may be a contact pad of a semiconductor die or lead frame towhich a wire is to be bonded by the transducer.

Preferably, where the force sensor monitors the contact force of anultrasonic weld transducer, the first time interval corresponds to thetime interval between separate welds, or between a number of welds.

Examples of force sensing apparatus in accordance with the inventionwill now be described with reference to the accompanying drawings, inwhich:

FIG. 1 is plan view of a bond body for a wire bonding machine with afirst example of a transducer holder and a transducer;

FIG. 2 is a side view of the bond body and the first transducer holder;

FIG. 3 is an end view of the bond body and the first transducer holder;

FIG. 4 is an end view of the bond body with a second example of atransducer holder; and

FIG. 5 is an end view of the bond body with a third example of atransducer holder.

FIGS. 1, 2 and 3 show a first example of a transducer holder 1 which ismounted on a bond-body 2 using four screws 3 a, 3 b, 3 c and 3 d. Theholder 1 has a recessed portion 10 in which a piezoelectric sensor 4 anda spring washer 5 are located. The sensor 4 is disc shaped with acentral hole through which the screw 3 c extends. The sensor 4 issandwiched between a face 11 of the recessed portion 10 of thetransducer holder 1 and the spring washer 5. The spring washer 5 issandwiched between a surface 12 of the bond-body 2 and the sensor 4.Although the force sensor 4 is a piezoelectric force sensor, the forcesensor 4 could be an electrorestrictive force sensor.

The two planar faces of the force sensor 4, are precision ground to ahigh degree of flatness and parallelism. The spring washer 5 provides apre-load to the force sensor 4. The pre-load can be adjusted byadjusting the torque applied to the screws 3 a, 3 b, 3 c and 3 d, whichcan be set using a conventional torque driver (not shown).

A transducer 8 is mounted in the holder 1 such that a working end 13 ofthe transducer 8 extends away from the holder 1 and the bond body 2. Thetransducer 8 is a conventional transducer used for ultrasonic welding tobond wires to contact pads of semiconductor dies and lead frames duringthe packaging of semiconductor devices. The working end 13 includes acapillary 7, which has a through bore extending along its longitudinalaxis. The through bore permits a wire (not shown) to be bonded to aworkpiece 9 to pass through the capillary 7 to a tip 14 of the capillary7. Hence, when the transducer vibrates at an ultrasonic frequency, andthe tip 14 is in contact with the workpiece 9, the end of the wirevibrates against the workpiece 9 to ultrasonically weld the wire to theworkpiece 9.

The bond body 2 is mounted on an actuator 6 which moves the bond body 2by translation or limited angular rotation, until the tip 14 of thecapillary 7 contacts the workpiece 9 to which the wire is to be bonded.After contact is made, the actuator 6 increases the applied force on thebond body 2, which generates a proportional increase in the reactionforce of the workpiece 9 on the capillary tip 14. This force generates abending moment on the transducer holder 1, which results in a partialloss of the preload on the force sensor 4. As the force sensor 4 is apiezoelectric force sensor, the sensor 4 generates a voltage which isindicative of the force applied between the surfaces to the sensor 4.Therefore, a change in the pre-load applied to the sensor produces achange in the voltage from the sensor 4, which is proportional to thechange in pre-load. Therefore, the voltage signal emitted by the sensorcan be processed to provide an indication of the contact force (or bondforce) between the tip 14 and the workpiece 9.

A second example of a transducer holder 17 is shown in FIG. 4. Thetransducer holder 17 is mounted onto the bond body 2 by three screws 3a, 3 b, 3 e. Two of the screws 3 a, 3 b are located adjacent an upperedge of the holder 17 and the third screw 3 e is located centrallyadjacent a lower edge of the holder 17. The force sensor 4 is located ina central recess 18 at the lower edge of the holder 17 and the screw 3 eextends through the recess 18, the force sensor 4 and the spring washer5 (not shown in FIG. 4).

A third example of a transducer holder 19 is shown in FIG. 5. The holder19 is more compact than the holders 1, 17 as there is no central hole inthe force sensor 20. The pre-load is provided by the screws 3 a, 3 b, 3c, 3 d at the corners of the holder 19 which are spaced from the sensor20. The sensor 20 and spring washer 5 (not shown in FIG. 5) are locatedin a recess 21 located centrally adjacent the lower edge of thetransducer holder 19.

The transducer holders 17, 19 and the sensors 4, 20 in FIGS. 4 and 5operate in the same manner as the transducer holder 1 and sensor 4 inFIGS. 1 to 3. In general, the force sensor 4, 20 can be located at anyconvenient location, sandwiched between the transducer holder 1, 17, 19and the bond body 2.

By having an indication of the bond force it is possible to determinethe quality of a bond as the bond force has an effect on bond quality.In addition, the voltage signal as a measure of the bond force, can beused as an input to a closed loop control system for the bond head toenable higher operational speeds and better process control.

During motion from one bond to the next bond, the acceleration of thebond head also generates vibration of the transducer 8 which also givesrise to bending moments on the transducer holder 1, 17, 19. Thesebending moments either tend to unload or further load the force sensor4, 20 depending upon the direction of acceleration. The resultingchanges in the voltage signal from the sensor 4, 20 is thus a measure ofthe inertial forces on the bond body 2, transducer holder 1, 17, 19 andtransducer 8 during motion. This voltage signal also forms an importantinput to the control system of the bond head.

The present invention uses only one sensor 4, 20 and mitigates theproblem of voltage drift by resetting the force sensor 4, 20 after everybond and re-activating it again just before the next bond. The voltagelevel from the sensor at re-activation is used as the reference level.The voltage level during bonding is then subtracted from the referencelevel. This difference in the voltage levels just before and duringbonding is the measure of the bond force. This method of compensatingfor voltage drift assumes that the rate of drift is negligible duringone bonding operation so that the amount of accumulated drift during theactive period (a single bonding operation) of the force sensor 4, 20 isnegligible.

Therefore, the invention has the advantages of using a single forcesensor 4, 20 by compensating for output voltage drift of the sensor.This enables the sensor arrangement to be compact and less expensive andless complicated than prior art arrangements.

What is claimed is:
 1. Force sensing apparatus for sensing deflection ofa transducer in an ultrasonic welding machine, the apparatus comprisinga body member, a transducer holder adapted to hold an ultrasonictransducer, the transducer holder being fixed to the body member, and aforce sensor located between adjacent surfaces of the body member andthe transducer holder to sense a force applied between the surfaces. 2.Apparatus according to claim 1, wherein the force sensor senses a forceapplied in a direction substantially parallel to the longitudinal axisof the transducer.
 3. Apparatus according to claim 1, wherein theadjacent surfaces of the body member and the transducer holder areoblique to the longitudinal axis of the transducer.
 4. Apparatusaccording to claim 3, wherein the adjacent surfaces are substantiallyperpendicular to the longitudinal axis of the transducer.
 5. Apparatusaccording to claim 1, wherein the force sensor comprises a piezoelectricforce sensor.
 6. Apparatus according to claim 1, wherein the forcesensor comprises an electrostrictive force sensor.
 7. Apparatusaccording to claim 1, further comprising a biasing device locatedbetween one of the adjacent surfaces and the force sensor to provide apreload to the force sensor.